![]() ![]() ![]() P21: MEMS BEAM LENGTH CONTROL BY OPTIMIZING SILICON OXYGEN CONCENTRATION FOR WET ETCHING Latikka M. P20: HIGH-ASPECT RATIO MICROELECTRODES ARRAY WITH DIFFERENT PENETRATING LENGTH FOR NEURAL APPLICATIONS Kilpinen P. P19: THERMOMECHANICAL ANALYSIS OF PLATINUM MICROHEATERS ON POLYIMIDE MEMBRANE Goncalves B. P18: DIRECT METHANOL MICRO FUEL CELL FABRICATED BY BULK ALUMINUM MICROMACHINING Predanocy M. P17: ZERO TEMPERATURE COEFFICIENT OF RESISTIVITY IN NICHROME Scotti G. P16: WAFER-LEVEL AU-AU THERMOCOMPRESSION BONDING FOR HERMETIC DEVICE SEALING Hill C. P15: THE EFFECT OF SELF-ASSEMBLED MONOLAYERS ON GLUTAMATE OXIDASE IMMOBILISATION Tofteberg H. P14: FLUID MECHANICS OF SUPERCRITICAL CARBON DIOXIDE WITH WATER IN A DOUBLE-Y-CHANNEL MICROFLUIDIC CHIP Kaivosoja E. P13: DESIGN AND FABRICATION OF LOSSY FABRY-PEROT DETECTOR FOR INFRA-RED ABSORPTION SPECTROSCOPY ON COMBUSTIBLE GASES Ogden S. P12: DESIGN AND PRELIMINARY FABRICATION OF AN ELASTOCAPILLARY FOLDED OUT-OF-PLANE MICROFLOWN SENSOR Ayerden N. P11: AN ELECTROMAGNETIC MEMS-BASED RESONATOR DESIGN FOR CATHETER TRACKING IN MRI Legrain A. P10: CHARACTERIZATION OF MICROMACHINED MILLIMETER-WAVE MEDICAL PROBE USING SILICON TEST SAMPLES WITH TAILOR-MADE PERMITTIVITY PATTERN Cakaci A. P9: MEASUREMENT OF THE HIGH GAMMA RADIATION DOSE USING THE MEMS BASED DOSIMETER AND RADIOLISYS EFFECT Töpfer F. ![]() P8: GRINDING DAMAGE REMOVAL RESULTS IN LOW COST NON-POLISHED MEMS WAFER Olszacki M. P7: IN-LIQUID CHARACTERIZATION OF IN-PLANE AND HIGH ORDER OUT-OF-PLANE MODES OF ALN-BASED SQUARE MICROPLATES Kilpinen P. P6: DEVELOPMENT OF NEW METALLIZATION PROCESSES FOR HIGH ASPECT RATIO THROUGH-SILICON-VIA (TSV) Ruiz-Diez V. P1: Key technologies and industrial applications of MEMSįlash session 1: Monday 10:00-11:00 Ebefors T. ![]() MME2013 technical program Welcome: Monday 08:50-09:00 Invited speaker 1: Monday 09:00-09:40 Lärmer F. ![]()
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